Lined Diaphragm Series Valve's diaphragm is made of high-purity fluoropolymer material
and maintains excellent airtightness due to its specialized design structure. It is used as a
control valve for equipment and pressure vessels that supply high purity chemical lines in
the semiconductor and LCD industries.
Technical Specifications
Actuator Type
Pneumatic Air Operation
Configuration
2-Way Flow : Weir Type
Operating Specification
Operating Temperature
Maximum Operating Pressure
0~90℃
9㎏/㎠(0.9Mpa)
90~120℃
7㎏/㎠(0.7Mpa)
Material Construction
· PFA Lining : High Purity PFA · Cylinder      : Aluminum Die Casting